Bias voltage influence on surface morphology of titanium nitride synthesized by dynamic nitrogen and titanium plasma immersion ion implantation and deposition
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference16 articles.
1. Atomic force microscopy study on topography of films produced by ion‐based techniques
2. Synthesis of Ti-N thin films prepared by dynamic ion mixing technique and their mechanical properties
3. Wear reduction of TA6V produced by SiC coatings deposited by dynamic ion mixing
4. Properties of titanium nitride fabricated on stainless steel by plasma-based ion implantation/deposition
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Investigations on mechanical and electrical properties of N+ions implanted TiN thin films;Materials Research Express;2017-04-12
2. Influence of negative bias voltage on structural and mechanical properties of nanocrystalline TiNx thin films treated in hot cathode arc discharge plasma system;Ceramics International;2016-12
3. TiN Coatings on Titanium Substrates Using Plasma Assisted Ion Implantation;Journal of Physics: Conference Series;2015-03-24
4. Effect of pulsed bias on TiO2 thin films prepared on silicon by arc ion plating and simulation of pulsed plasma sheath dynamics;Thin Solid Films;2012-10
5. Friction and Wear Behaviors and Rolling Contact Fatigue Life of TiN Film on Bearing Steel by Plasma Immersion Ion Implantation and Deposition Technique;Advanced Tribology;2009
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