A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation
Author:
Publisher
Elsevier BV
Subject
Fluid Flow and Transfer Processes,Mechanical Engineering,Condensed Matter Physics
Reference24 articles.
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5. Fluid like transport variables in a kinetic, collisionless plasma near a surface with ion and electron reflections;Wei;IEEE Trans. Plasma Sci.,2000
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1. Literature Survey of Numerical Heat Transfer (2000–2009): Part II;Numerical Heat Transfer, Part A: Applications;2011-12
2. Prediction of the transient and steady temperature distributions in a two-layer composite slab in contact with a plasma: exact closed-form solutions;Journal of Physics D: Applied Physics;2007-06-04
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