Suppression of donor-vacancy clusters in germanium by concurrent annealing and irradiation
Author:
Funder
Deutsche Forschungsgemeinschaft
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3534791
Reference22 articles.
1. Activation and diffusion studies of ion-implanted p and n dopants in germanium
2. Germanium n-type shallow junction activation dependences
3. P implantation doping of Ge: Diffusion, activation, and recrystallization
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