Evaluation of different dispersion models for correlation of spectroscopic ellipsometry and X-ray reflectometry
Author:
Affiliation:
1. GLOBALFOUNDRIES Dresden Module One LLC & Co. KG, Wilschdorfer Landstr. 101, D-01109 Dresden, Germany
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5050492
Reference60 articles.
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4. Surface/interface analysis and optical properties of RF sputter-deposited nanocrystalline titanium nitride thin films
5. On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films
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