Application of a B-spline model dielectric function to infrared spectroscopic ellipsometry data analysis-Reference-Cited by-同舟云学术

Application of a B-spline model dielectric function to infrared spectroscopic ellipsometry data analysis

Published:2020-01 Issue:1 Volume:38 Page:014001
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Mohrmann Joel¹^ORCID,Tiwald Thomas E.¹^ORCID,Hale Jeffrey S.¹,Hilfiker James N.¹,Martin Andrew C.¹

Affiliation:

1. J.A. Woollam Co., Inc., 645 M Street, Suite 102, Lincoln, Nebraska 68508

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5126110

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