Rapid thermal annealing of arsenic and boron‐implanted silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94200
Reference6 articles.
1. Solid-Phase-Epitaxial Growth in Ion-Implanted Silicon
2. Heat-pulse annealing of arsenic-implanted silicon with a CW arc lamp
3. Short Time Annealing
4. Flame annealing of arsenic and boron implanted silicon
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