Solid-Phase-Epitaxial Growth in Ion-Implanted Silicon
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. , and (Ed.), Ion Implantation in Semiconductors, Academic Press, New York 1970.
2. A comparative study of laser and thermal annealing of boron‐implanted silicon
3. Laser Annealing of Ion-Implanted Semiconductors
4. Melting phenomenon and properties of defects associated with pulsed laser irradiation†
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