Effects of the substrate bias on the formation of cubic boron nitride by inductively coupled plasma enhanced chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.356411
Reference19 articles.
1. Direct Transformation of Hexagonal Boron Nitride to Denser Forms
2. Preparation, properties and applications of boron nitride thin films
3. Preparation of Semiconducting Cubic Boron Nitride
4. Preparation of cubic boron nitride film by activated reactive evaporation with a gas activation nozzle
5. Formation of cubic boron nitride films by arc‐like plasma‐enhanced ion plating method
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