Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method-Reference-Cited by-同舟云学术

Spectroscopic ellipsometry characterization of boron nitride films synthesized by a reactive plasma-assisted coating method

Published:2022-01-17 Issue:3 Volume:120 Page:031904
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Hamano Takashi¹^ORCID,Matsuda Takayuki¹,Asamoto Yuya¹,Noma Masao²,Hasegawa Shigehiko³^ORCID,Yamashita Michiru⁴^ORCID,Urabe Keiichiro¹^ORCID,Eriguchi Koji¹^ORCID

Affiliation:

1. Department of Aeronautics and Astronautics, Kyoto University, Kyoto 615-8540, Japan

2. Shinko Seiki Co., Ltd., Shiga 524-0051, Japan

3. SANKEN (The Institute of Scientific and Industrial Research), Osaka University, Osaka 567-0047, Japan

4. Hyogo Prefectural Institute of Technology, Hyogo 654-0037, Japan

Funder

Japan Society for the Promotion of Science

Network Joint Research Center for Materials and Devices

Naito Taisyun Science and Technology Foundation

O.S.G Foundation

Nanotechnology Platform Program of the MEXT

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0077147

Reference33 articles.

1. Ultrathin high-temperature oxidation-resistant coatings of hexagonal boron nitride

2. Porous boron nitride nanosheets for effective water cleaning

3. Ultrahard nanotwinned cubic boron nitride

4. Layer-by-Layer Dielectric Breakdown of Hexagonal Boron Nitride

5. Recent progress and perspectives of space electric propulsion systems based on smart nanomaterials

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