Simultaneous occurrence of multiphases in the interfacial reactions of ultrahigh vacuum deposited Hf and Cr thin films on (111)Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108803
Reference7 articles.
1. Identification of the first nucleated phase in the interfacial reactions of ultrahigh vacuum deposited titanium thin films on silicon
2. Growth kinetics of amorphous interlayers by solid‐state diffusion in polycrystalline Zr and Hf thin films on (111)Si
3. Thermodynamics, Kinetics and Interface Morphology of Reactions Between Metals and GaAs
4. First phase nucleation in silicon–transition‐metal planar interfaces
5. A kinetic model for solid‐state silicide nucleation
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