Parallel nanolithography in carbon layers with conductive imprint stamps
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125895
Reference9 articles.
1. Scanning tunneling microscopy based lithography employing amorphous hydrogenated carbon as a high resolution resist mask
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4. Nanolithography of metal films using scanning force microscope patterned carbon masks
5. Writing nanometer-scale pits in sputtered carbon films using the scanning tunneling microscope
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