AC parallel local oxidation of silicon-Reference-Cited by-同舟云学术

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AC parallel local oxidation of silicon

Published:2019 Issue:10 Volume:1 Page:3887-3891
ISSN:2516-0230
Container-title:Nanoscale Advances
language:en
Short-container-title:Nanoscale Adv.

Author:

Hemmatian Zahra¹²³⁴,Gentili Denis¹²³⁴^ORCID,Barbalinardo Marianna¹²³⁴,Morandi Vittorio⁵²³⁴^ORCID,Ortolani Luca⁵²³⁴^ORCID,Ruani Giampiero¹²³⁴,Cavallini Massimiliano¹²³⁴^ORCID

Affiliation:

1. Istituto per lo Studio dei Materiali Nanostrutturati

2. Consiglio Nazionale delle Ricerche

3. 40129 Bologna

4. Italy

5. Istituto per la Microelettronica e i Microsistemi

Abstract

Here, we present a suitable advancement of parallel local oxidation nanolithography, demonstrating its feasibility in alternate current mode (AC-PLON).

Publisher

Royal Society of Chemistry (RSC)

Subject

General Engineering,General Materials Science,General Chemistry,Atomic and Molecular Physics, and Optics,Bioengineering

Link

http://pubs.rsc.org/en/content/articlepdf/2019/NA/C9NA00445A

Reference28 articles.

1. Nanoscale Materials Patterning by Local Electrochemical Lithography

2. Advanced oxidation scanning probe lithography

3. Advanced scanning probe lithography

4. Progress in Micro- and Nanopatterning via Electrochemical Lithography

5. Centimeter scale atomic force microscope imaging and lithography

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