Low-temperature fabrication of fine structures on glass using electrical nanoimprint and chemical etching
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4819321
Reference22 articles.
1. High-efficiency transmission gratings buried in a fused-SiO_2 glass plate
2. Achromatic quarter-wave plates using the dispersion of form birefringence
3. Fabrication of Microcone Array for Antireflection Structured Surface Using Metal Dotted Pattern
4. Duty ratio-dependent fluorescence enhancement through surface plasmon resonance in Ag-coated gratings
5. Fabrication of 1∕4 wave plate by nanocasting lithography
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