Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2952058
Reference15 articles.
1. Nanometer-Scale Analysis of CurrentLimited Stresses Impact on SiO<tex>$_2$</tex>Gate Oxide Reliability Using C-AFM
2. Breakdown kinetics at nanometer scale of innovative MOS devices by conductive atomic force microscopy
3. The Effect of Nanoscale Nonuniformity of Oxygen Vacancy on Electrical and Reliability Characteristics of $\hbox{HfO}_{2}$ MOSFET Devices
4. Nanoscale Bias-Annealing Effect in Postirradiated Thin Silicon Dioxide Films Observed by Conductive Atomic Force Microscopy
5. C-AFM-based thickness determination of thin and ultra-thin SiO 2 films by use of different conductive-coated probe tips
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