Observation and mitigation of RF-plasma-induced damage to III-nitrides grown by molecular beam epitaxy
Author:
Affiliation:
1. School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, USA
2. National Renewable Energy Laboratory, Golden, Colorado 80401, USA
Funder
National Science Foundation
Advanced Research Projects Agency - Energy
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.5097557
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