Subject
General Physics and Astronomy
Cited by
22 articles.
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1. A study of ion channeling patterns at minor axes in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-07
2. Effects of switching from 〈110〉 to 〈100〉 channel orientation and tensile stress on n-channel and p-channel metal–oxide-semiconductor transistors;Solid-State Electronics;2010-04
3. Explicit phase shift factor stopping model for multi-component targets;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2003-12
4. Process integration issues for doping of ultrashallow junctions;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
5. Channeling of low-energy implanted ions through the poly-Si gate;IEEE Electron Device Letters;1999-07