A new gas purifier for ArF excimer lasers-Reference-Cited by-同舟云学术

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A new gas purifier for ArF excimer lasers

Published:1996-03 Issue:3 Volume:67 Page:658-661
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Ito S.,Saito T.,Tada A.

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1146837

Reference7 articles.

1. Gas composition and lifetime studies of discharge excited rare-gas halide lasers

2. Analysis of chemical degradation products in an e-beam pumped rare-gas halide laser

3. Gas contaminants produced in electron-beam-pumped XeF lasers

4. Fluorocarbon impurities in KrF lasers

5. Gas contaminant effects in discharge-excited KrF lasers

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Solid‐state laser (266 nm) as an alternative to ArF excimer laser (193 nm) for corneal reshaping: Comparative numerical study of the thermal effect;International Journal for Numerical Methods in Biomedical Engineering;2024-08-18

2. Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation;Applied Physics B;2001-05

3. Output stabilization technology with chemical impurity control on ArF excimer laser;SPIE Proceedings;2000-07-05

4. Gas contaminant effect in a discharge-excited ArF excimer laser;Applied Physics B;1998-05

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