Fluorocarbon impurities in KrF lasers
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.347555
Reference24 articles.
1. Gas composition and lifetime studies of discharge excited rare-gas halide lasers
2. N2excited state absorption in XeF lasers
3. Analysis of chemical degradation products in an e-beam pumped rare-gas halide laser
4. Gas contaminants produced in electron-beam-pumped XeF lasers
5. Quenching rate constants for metastable argon, krypton, and xenon atoms by fluorine containing molecules and branching ratios for XeF* and KrF* formation
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Gas contaminant effect in a discharge-excited ArF excimer laser;Applied Physics B;1998-05
2. Absorption Lines ofO2and HF in KrF Laser Spectrum;Japanese Journal of Applied Physics;1996-08-15
3. A new gas purifier for ArF excimer lasers;Review of Scientific Instruments;1996-03
4. Spectrochemical analysis of trace contaminants in helium (helium–fluorine) pulsed discharge plasmas;J. Anal. At. Spectrom.;1996
5. Absorption Lines of Vibrationally ExcitedO2and HF in ArF Laser Spectrum;Japanese Journal of Applied Physics;1994-08-15
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