Assessment of the extent of atomic mixing from sputtering experiments
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.331356
Reference16 articles.
1. Ion‐induced migration of Cu into Si
2. Sputtering of PtSi
3. Implications in the use of sputtering for layer removal: the system Au on Si
4. Influence of atomic mixing and preferential sputtering on depth profiles and interfaces
5. Projectile-energy dependence of compositional changes produced in sputtering of a dilute Si(Fe, W) alloy
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