Implications in the use of sputtering for layer removal: the system Au on Si-Reference-Cited by-同舟云学术

Implications in the use of sputtering for layer removal: the system Au on Si

Published:1979-01 Issue:3 Volume:43 Page:105-110
ISSN:0033-7579
Container-title:Radiation Effects
language:en
Short-container-title:Radiation Effects

Author:

Blank P.,Wittmaack K.

Publisher

Informa UK Limited

Subject

General Engineering

Link

http://www.tandfonline.com/doi/pdf/10.1080/01422447908226479

Reference18 articles.

1. Computer simulation of atomic mixing during ion bombardment

2. von der Weg, W. F., Sigurd, D. and Mayer, J. W. 1974.Application of Ion Beams to Metals, Edited by: Picraux, S. T., EerNisse, E. P. and Vook, F. L. 209New York: Plenum Press.

3. Ion‐induced migration of Cu into Si

4. Sputtering of PtSi

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