Analytical and numerical computation of multipole components of magnetic deflectors
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1148404
Reference10 articles.
1. Recent Advances in Electron Beam Deflection
2. Computation of magnetic deflectors for electron beam lithography
3. Second-order finite element method and its practical application in charged particle optics
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