Fabrication of high aspect ratio silicon pillars of <10 nm diameter
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109798
Reference8 articles.
1. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
2. Porous silicon formation: A quantum wire effect
3. The origin of visible luminescencefrom “porous silicon”: A new interpretation
4. Sub‐50 nm high aspect‐ratio silicon pillars, ridges, and trenches fabricated using ultrahigh resolution electron beam lithography and reactive ion etching
5. Oxidation of sub-50 nm Si columns for light emission study
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