Nanowall formation by maskless wet-etching on a femtosecond laser irradiated silicon surface-Reference-Cited by-同舟云学术

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Nanowall formation by maskless wet-etching on a femtosecond laser irradiated silicon surface

Published:2018-04 Issue: Volume:437 Page:190-194
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Lee Siwoo,Jo Kukhyun,Keum Hee-sung,Chae Sangmin,Kim Yonghyeon,Choi Jiyeon,Lee Hyun Hwi,Kim Hyo Jung

Funder

Basic Science Research Program

Korean Government

World Class 300 project

Global collaborative R&D program

Korea government Ministry of Trade, Industry and Energy

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference32 articles.

1. Nanoscale lithography via electron beam induced deposition;Guan;Nanotechnology,2008

2. Superhydrophobic surfaces produced by applying a self-assembled monolayer to silicon micro/nano-textured surfaces;Song;Nano Res.,2009

3. Correlation between rub-induced grooves in a polyimide-treated substrate and microstructure of rubbing fiber: an atomic force microscopy study;Mahajan;J. Appl. Phys.,1998

4. Femtosecond laser micromachining of grooves in silicon with 800 nm pulses;Crawford;Appl. Phys. A,2005

5. Femtosecond laser ablation of silicon-modification thresholds and morphology;Bonse;Appl. Phys. A,2002

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1. Optical, structural and morphological studies of nanostructures fabricated on silicon surface by femtosecond laser irradiation;Journal of Materials Science;2022-01

2. Facile Fabrication of Self-Similar Hierarchical Micro-Nano Structures for Multifunctional Surfaces via Solvent-Assisted UV-Lasering;Micromachines;2020-07-14

3. Pedestal microdisks in potassium yttrium double tungstate;Optical Materials Express;2019-07-15

4. Fabrication of large-scale uniform submicron inverted pyramid pit arrays on silicon substrates by laser interference lithography;Vacuum;2019-07

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