Fine crystalline grain model for the determination of the morphology of ultrathin amorphous silicon films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1450046
Reference26 articles.
1. Structural, defect, and device behavior of hydrogenated amorphous Si near and above the onset of microcrystallinity
2. Features of hydrogenated amorphous silicon films developed under an unexplored region of parameter space of radio-frequency plasma-enhanced chemical vapor deposition
3. Ortho-molecular hydrogen in hydrogenated amorphous silicon
4. Temperature dependence of the dielectric function and interband critical points in silicon
5. Thermodynamic Criterion for the Stability of Amorphous Intergranular Films in Covalent Materials
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3. Real time spectroscopic ellipsometry on ultrathin (<50Å) hydrogenated amorphous silicon films on Si(100) and GaAs(100);Journal of Applied Physics;2007-06-15
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