Characterization and elimination of dry etching damaged layer in Pt/Pb(Zr0.53Ti0.47)O3/Pt ferroelectric capacitor
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124367
Reference7 articles.
1. Fatigue-free ferroelectric capacitors with platinum electrodes
2. Process and properties of Pt/Pb(Zr, Ti)O3/Pt integrated ferroelectric capacitors
3. Etching Effects on Ferroelectric Capacitors with Multilayered Electrodes
4. Fabrication and comparison of ferroelectric capacitor structures for memory applications
5. Dry Etching Issues in the Integration of Ferroelectric Thin Film Capacitors
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