Epitaxial growth of single-crystalline AlN films on tungsten substrates
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2404588
Reference10 articles.
1. Optical properties of AlN epitaxial thin films in the vacuum ultraviolet region
2. The intrinsic thermal conductivity of AIN
3. Room-temperature epitaxial growth of AlN films
4. Acoustic bulk wave composite resonators
5. Influence of electrode configurations on the quality factor and piezoelectric coupling constant of solidly mounted bulk acoustic wave resonators
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