Plasma-chemical vapor deposition of wide band gap a-SiC:H films: An ab initio molecular-orbital study
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.372450
Reference13 articles.
1. Successive hydrogen-elimination reactions with low activation energies in thea-Si:H formation process: Anab initiomolecular-orbital study
2. Ab initiomolecular-orbital study on successive hydrogen-elimination reactions with low activation energies in thea-Si:H formation process: Cluster-size dependence of activation energies
3. Ab initio molecular-orbital study on the surface reactions of methane and silane plasma chemical vapor deposition
4. Determination of the H distribution in reactively sputtered amorphous silicon‐hydrogen alloys by proton nuclear magnetic resonance
5. Electron-spin-echo envelope-modulation study of the distance between dangling bonds and hydrogen atoms in hydrogenated amorphous silicon
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Structural and optical properties of nc-3C–SiC films synthesized by hot wire chemical vapor deposition from SiH4–C2H2–H2 mixture;Thin Solid Films;2012-11
2. Formation of α-Si1−xCx:H and nc-SiC films grown by HWCVD under different process pressure;Applied Surface Science;2011-11
3. The Properties and Uniformity Change of Amorphous SiC:H Film Deposited using Remote PECVD System with Various Deposition Conditions;Journal of the Korean Ceramic Society;2010-05-31
4. The C2H2 gas effect on the growth behavior of remote plasma enhanced CVD SiC:H film;Journal of Electroceramics;2006-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3