Bilayer metal gate electrodes with tunable work function: Adhesion and interface characterization
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3466957
Reference23 articles.
1. Characteristics and mechanism of tunable work function gate electrodes using a bilayer metal structure on SiO/sub 2/ and HfO/sub 2/
2. High-<tex>$kappa$</tex>/Metal–Gate Stack and Its MOSFET Characteristics
3. Dual work function metal gate CMOS technology using metal interdiffusion
4. Work function controllability of metal gates made by interdiffusing metal stacks with low and high work functions
5. Bilayer metal gate electrodes with tunable work function: Mechanism and proposed model
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