Optical models for ultrathin oxides on Si- and C-terminated faces of thermally oxidized SiC
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3270424
Reference31 articles.
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4. Limiting Step Involved in the Thermal Growth of Silicon Oxide Films on Silicon Carbide
5. Oxygen isotopic tracing study of the dry thermal oxidation of 6H SiC
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