Subject
General Physics and Astronomy
Cited by
29 articles.
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1. Process Simulation;Springer Handbook of Semiconductor Devices;2022-11-11
2. Origin of Indium Diffusion in High-k Oxide HfO2;ACS Applied Materials & Interfaces;2016-03-10
3. Role of Defects in the Dopant Diffusion in Si;Semiconductors and Semimetals;2015
4. Point Defects, Diffusion, and Precipitation;Materials Science and Technology;2013-02-15
5. Front-end process modeling in silicon;The European Physical Journal B;2009-11-07