Reduction of defects in laser‐induced crystallized and amorphized silicon films using plasma hydrogenation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357962
Reference43 articles.
1. Pulsed Laser-Induced Amorphization of Polycrystalline Silicon Film
2. Pulsed laser‐induced amorphization of silicon films
3. Pulsed laser‐induced melting followed by quenching of silicon films
4. XeCl Excimer laser annealing used in the fabrication of poly-Si TFT's
5. High-performance TFTs fabricated by XeCl excimer laser annealing of hydrogenated amorphous-silicon film
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