Concepts and designs of ion implantation equipment for semiconductor processing
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2354571
Reference59 articles.
1. Experience in fabricating semiconductor devices using ion implantation techniques
2. Canal rays to ion implantation: 1886-1986
3. THE HISTORICAL DEVELOPMENT OF ION IMPLANTATION
4. A history of commercial implantation
5. A history of commercial implantation
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