A history of commercial implantation-Reference-Cited by-同舟云学术

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A history of commercial implantation

Published:1985-01 Issue:1-2 Volume:6 Page:1-8
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Rose Peter H.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference5 articles.

1. Historical perspective and future trends for ion implantation systems

2. Proc. 3rd Int. Conf. Ion Implantation Equipment and Techniques,1980

3. these Proceedings (Ion Implantation Equip. & Tech. '84),1984

4. Tandem Van De Graaff Accelerators

5. Proc. Europ. Conf. on Ion Implantation;Freeman,1970

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