Study of minority carrier traps in p-GaN gate HEMT by optical deep level transient spectroscopy

Author:

Chen Jiaxiang123,Huang Wei4,Qu Haolan123,Zhang Yu123,Zhou Jianjun5ORCID,Chen Baile1ORCID,Zou Xinbo16ORCID

Affiliation:

1. School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China

2. Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

3. The School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

4. School of Microelectronics, Fudan University, Shanghai 200433, China

5. Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, 524 East Zhongshan Road, Nanjing 210016, China

6. Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, Shanghai 200031, China

Abstract

Properties of minority carrier (electron) traps in Schottky type p-GaN gate high electron mobility transistors were explicitly investigated by optical deep level transient spectroscopy (ODLTS). By temperature-scanning ODLTS, three electron traps, namely, E1, E2, and E3, were revealed, together with activation energy, capture cross section, and trap concentration. A thermally accelerated electron-releasing process of traps was quantitatively studied by Laplace ODLTS with individual emission time constant disclosed. At 300 K, the emission time constant was determined to be 0.21 and 1.40 s for E2 and E3, respectively, which adjacently existed in the bandgap and held activation energies of over 0.6 eV. As varying the optical injection pulse duration, a three-dimensional mapping of capacitance transient was obtained for each trap, attesting to the electron capture capability of each trap. By varying the reverse bias, the analysis of the ODLTS signal amplitude indicates that all three electron traps are located inside the p-GaN layer rather than the surface defect related.

Funder

ShanghaiTech University

National Natural Science Foundation of China

Natural Science Foundation of Shanghai

CAS Strategic Science and Technology Program

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. A Trap Characterization System for GaN HEMTs Based on Transient Drain Voltage;IEEE Transactions on Instrumentation and Measurement;2024

2. Study on the Influence of Defects in Recessed-Gate GaN MIS-HEMTs by TCAD Simulation;2023 20th China International Forum on Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS);2023-11-27

3. Trap Characterization Techniques for GaN-Based HEMTs: A Critical Review;Micromachines;2023-10-31

4. RF p-GaN HEMT With 0.9-dB Noise Figure and 12.8-dB Associated Gain for LNA Applications;IEEE Electron Device Letters;2023-09

5. Evaluation of Trapping Behaviors in Forward Biased Schottky-Type p-GaN Gate HEMTs;IEEE Transactions on Electron Devices;2023-07

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