Defect structure of carbon rich a-SiC:H films and the influence of gas and heat treatments
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368138
Reference27 articles.
1. Microvoids in amorphous Si1−xCx:H alloys studied by small‐angle x‐ray scattering
2. Amorphous Silicon-Carbide Multilayered Visible-Light Emitting Diode
3. Effect of annealing on the defect structure ina‐SiC:H films
4. Hydrogen diffusion and related defects in hydrogenated amorphous silicon carbide
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