Sputtering of Gold by Low Energy Inert Gas Ions
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1728884
Reference23 articles.
1. Controlled Sputtering of Metals by Low-Energy Hg Ions
2. Low-Energy Sputtering Yields in Hg
3. Sputtering Yield of Germanium in Rare Gases
4. Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev
5. New Method for Measuring Sputtering in the Region Near Threshold
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1. Quantitative sputtering;Surface and Interface Analysis;1988-01
2. Detection of sputtered neutrals by multi-photon resonance ionization;Nuclear Instruments and Methods in Physics Research;1983-12
3. Characterization of solids and surfaces using ion beams and mass spectrometry;Progress in Solid State Chemistry;1981-01
4. Sputtering yield measurements;Topics in Applied Physics;1981
5. Incorpation of Helium in Deposited Gold Films;Journal of Vacuum Science and Technology;1971-01
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