New Method for Measuring Sputtering in the Region Near Threshold
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1717296
Reference4 articles.
1. Sputtering of Alkali Atoms by Inert Gas Ions of Low Energy
2. Sputtering Thresholds and Displacement Energies
3. A High Efficiency Ion Source
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