Infrared properties of room-temperature-deposited ZrO2
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1384476
Reference10 articles.
1. Thermodynamic stability of binary oxides in contact with silicon
2. Stable zirconium silicate gate dielectrics deposited directly on silicon
3. Optical constants of tetragonal and cubic zirconias in the infrared
4. Raman and Fourier-transform infrared photoacoustic spectra of granularZrO2
5. FT-IR and laser Raman spectroscopic investigation of the formation and stability of low temperature t-ZrO2
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