Author:
Melamud Renata,Kim Bongsang,Chandorkar Saurabh A.,Hopcroft Matthew A.,Agarwal Manu,Jha Chandra M.,Kenny Thomas W.
Subject
Physics and Astronomy (miscellaneous)
Reference18 articles.
1. J. R. Vig and A. Ballato, in Ultrasonic Instruments and Devices, edited by E. P. Papadakis (Academic, San Diego, 1999), pp. 637–701.
2. MEMS technology for timing and frequency control
3. Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators
4. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS);Hsu W.-T.,2002
5. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS);Hopcroft M. A.,2006
Cited by
86 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献