Simulation of flow and debris migration in extreme ultraviolet source vessel

Abstract

Practical extreme ultraviolet (EUV) sources yield the desired 13.5 nm radiation but also generate debris, significantly limiting the lifespan of the collector mirror in lithography. In this study, we explore the role of buffer gas in transporting debris particles within an EUV source vessel using direct numerical simulations. Our study involves a 2 × 1 × 1m3 rectangular cavity with an injecting jet flow subjected to sideward outlet. Debris particles are introduced into the cavity with specified initial velocities, simulating a spherical radiating pattern with particle diameters ranging from 0.1 to 1 μm. Varying the inflow velocity (from 1 to 50 m/s) of the buffer gas reveals a morphological transition in the flow field. At low inflow velocities, the flow remains steady, whereas higher inflow velocities induce the formation of clustered corner rolls. Upon reaching sufficiently high inflow velocities, the jet flow can penetrate the entire cavity, impacting the end wall. Interestingly, the resulting recirculation flow leads to the spontaneous formation of spiraling outflow. The distinct flow structures at various inflow velocities lead to distinct patterns of particle transport. For low-speed gas, it is efficient in expelling all particles smaller than 0.4 μm, while for high-speed gas, those fine particles accumulate near the end wall and are challenging to be extracted. Our findings highlight the significance of controlling flow conditions for effective debris particle transport and clearance in diverse applications especially in EUV source vessels.