Moore's law, lithography, and how optics drive the semiconductor industry-Reference-Cited by-同舟云学术

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Moore's law, lithography, and how optics drive the semiconductor industry

Published:2018-03-19 Issue: Volume: Page:
ISSN:
Container-title:Extreme Ultraviolet (EUV) Lithography IX
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Author:

Hutcheson G. Dan

Publisher

SPIE

Reference13 articles.

1. From private conversations with the author.

2. Progress in Digital Electronics;Moore,1975

3. Cramming more components into integrated circuits;Moore,1965

4. Implications of Historical Trends in the Electrical Efficiency of Computing;Koomey,2010

5. An additional constraint that Gordon himself put on it at the first NTRS roadmap meeting.

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