Graphene as discharge layer for electron beam lithography on insulating substrate
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4819732
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2. Dielectric-Like Behavior of Graphene in Au Plasmon Resonator;Nanoscale Research Letters;2016-12
3. A method to restrain the charging effect on an insulating substrate in high energy electron beam lithography;Journal of Semiconductors;2014-12
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