The electron bounce resonance in a low-pressure solenoidal inductive discharge
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1364673
Reference23 articles.
1. Plasma processing
2. Effect of Collisionless Heating on Electron Energy Distribution in an Inductively Coupled Plasma
3. Collisionless electron heating in an inductively coupled discharge
4. The finite size effect in a planar inductively coupled plasma
5. Stochastic electron heating in bounded radio‐frequency plasmas
Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effects of chamber size on electron bounce-resonance heating and power deposition profile in a finite inductive discharge;Physics of Plasmas;2022-06
2. Landau damping of electrons with bouncing motion in a radio-frequency plasma*;Chinese Physics B;2021-12-01
3. Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas;Journal of Vacuum Science & Technology B;2020-03
4. Analysis of energy relaxation kinetics for control of the electron energy distributions in capacitively coupled RF discharges;Plasma Sources Science and Technology;2018-04-27
5. Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma;Physics of Plasmas;2016-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3