Effect of Collisionless Heating on Electron Energy Distribution in an Inductively Coupled Plasma
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.81.369/fulltext
Reference19 articles.
1. Stochastic electron heating in bounded radio‐frequency plasmas
2. Quasilinear theory of collisionless electron heating in radio frequency gas discharges
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4. Anomalous Skin Effect in a Plasma
5. The anomalous skin effect in gas discharge plasmas
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