Dopant characterization in self-regulatory plasma doped fin field-effect transistors by atom probe tomography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3690864
Reference24 articles.
1. Integration challenges for multi-gate devices
2. Atom probe tomography
3. Toward atom probe tomography of microelectronic devices
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5. Atom-Probe Tomography of Semiconductor Materials and Device Structures
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