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Toward atom probe tomography of microelectronic devices

Published:2011-11-09 Issue: Volume:326 Page:012030
ISSN:1742-6596
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Larson D J,Lawrence D,Lefebvre W,Olson D,Prosa T J,Reinhard D A,Ulfig R M,Clifton P H,Bunton J H,Lenz D,Olson J D,Renaud L,Martin I,Kelly T F

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

http://stacks.iop.org/1742-6596/326/i=1/a=012030/pdf

Reference23 articles.

1. The Atom‐Probe Field Ion Microscope

2. Pulsed‐laser atom‐probe field‐ion microscopy

3. Atom Probe Tomography of Electronic Materials

4. Atom-Probe Tomography of Semiconductor Materials and Device Structures

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1. Atom probe tomography of nanomaterials;Encyclopedia of Nanomaterials;2023

2. Complementary and correlative (S)TEM/APT analysis of functional and structural alloys;MRS Bulletin;2022-07

3. Atom Probe Tomography Characterization of Dopant Distributions in Si FinFET: Challenges and Solutions;Microscopy and Microanalysis;2019-11-22

4. Atom-Probe Tomography;Springer Handbook of Microscopy;2019

5. Nanoscale Chemical Imaging of Zeolites Using Atom Probe Tomography;Angewandte Chemie International Edition;2018-08-13

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