Dynamic range of 106in depth profiling using secondary‐ion mass spectrometry
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91908
Reference14 articles.
1. Analytic methods for the ion microprobe mass analyzer. Part II.
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5. Depth profile detection limit of 3×1015 atom cm−3 for As in Si using Cs+ bombardment negative secondary ion mass spectrometry
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