Development of liquid-metal-ion source low-energy ion gun/high-temperature ultrahigh vacuum scanning tunneling microscope combined system
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2149001
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1. Novel Process for High-Density Buried Nanopyramid Array Fabrication by Means of Dopant Ion Implantation and Wet Etching
2. High-Density Nanoetchpit-Array Fabrication on Si Surface Using Ultrathin SiO2Mask
3. New Process for Si Nanopyramid Array (NPA) Fabrication by Ion-Beam Irradiation and Wet Etching
4. Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching
5. Simple fabrication of high density concave nanopyramid array (NPA)on Si surface
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1. Challenge for STM observation of dopant activation process on Si(001): in-situ ion irradiation and hydrogenation;physica status solidi (c);2012-03-15
2. Real-Time Scanning Tunneling Microscopy Observation of Si(111) Surface Modified by Au+Ion Irradiation;Japanese Journal of Applied Physics;2010-01-20
3. Development of an ion beam alignment system for real-time scanning tunneling microscope observation of dopant-ion irradiation;Review of Scientific Instruments;2008-07
4. Single-ion irradiation: physics, technology and applications;Journal of Physics D: Applied Physics;2008-01-28
5. Surface modification of silicon with single ion irradiation;Applied Surface Science;2007-10
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