Surface shape determination with a stitching Michelson interferometer and accuracy evaluation
Author:
Affiliation:
1. Synchrotron SOLEIL, L’Orme des Merisiers, Saint-Aubin, BP 48, 91192 Gif-sur-Yvette Cedex, France
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5061930
Reference33 articles.
1. An LTP stitching procedure with compensation of instrument errors: Comparison of SOLEIL and ESRF results on strongly curved mirrors
2. Determination and compensation of the “reference surface” from redundant sets of surface measurements
3. Development of a Linear Stitching Interferometric System for Evaluation of Very Large X-ray Synchrotron Radiation Substrates and Mirrors
4. Analysis of the positioning error on lateral shearing surface reconstruction with a Fizeau interferometer
5. A Fizeau interferometer system with double-pass and stitching for characterizing the figure error of large (>1m) synchrotron optics
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