Mechanical strength of silicon crystals with oxygen and/or germanium impurities
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.107399
Reference12 articles.
1. Mechanical Strength of Oxygen-Doped Float-Zone Silicon Crystals
2. Mechanical strength of silicon crystals as a function of the oxygen concentration
3. Effects of nitrogen on dislocation behavior and mechanical strength in silicon crystals
4. In situX-ray topographic study of the dislocation mobility in high-purity and impurity-doped silicon crystals
5. Interaction of dislocations with impurities in silicon crystals studied byin situX-ray topography
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1. The Study of Slip Defects in Furnace High Temperature Process;2023 China Semiconductor Technology International Conference (CSTIC);2023-06-26
2. Mechanical strength of Czochralski silicon crystal: Effects of co-doping germanium and nitrogen;Acta Physica Sinica;2021
3. Effects of co-doping nitrogen and germanium on dislocation gliding in Czochralski silicon: Implication for improving mechanical strength;Journal of Applied Physics;2020-12-21
4. Impact of germanium doping on the mechanical strength of low oxygen concentration Czochralski silicon wafers;Philosophical Magazine;2020-11-25
5. Effects of Antimony- and Tin-Doping on the Mechanical Propertiesof Czochralski Silicon: Revealing the Role of Electrical Activity of Antimony;Silicon;2019-08-15
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